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Failure analysis and packaging detection equipment
EMMI analytical system

EMMI analytical system

A standalone lab based analytical microscope system
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* The same model of product may have multiple versions, and there may be differences between different versions of the product (including functional parameters, logo design, appearance details, product information, etc.). Please refer to the actual product for accuracy

Product Overview
Product specifications
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A standalone lab based upright analytical microscope system

  • For backside and frontside analysis of wafers, wafer parts and packaged devices
  • Ultra-stable system compatible for probing FIB pads
  • Compatible with third-party probe stations, probe cards and manipulators
  • High resolution stage with 0.5 μm repeatability
  • Aplanatic Refractive Solid Immersion Lens (ARSIL) option, currently probing 3nm nodes
  • CAD interface option
  • Techniques include a combination of:
    • static: TIVA, OBIRCH
    • dynamic: LADA, SDL
    • Laser Timing Probe (LTP)
    • Scanning Optical Microscopy (SOM) with best sensitivity
  • Photon Emission Microscopy (PEM) with various options for
    • InGaAs or Si-CCD camera
    • Thermal Microscopy (THM) with InSb camera

APPLICATION:

For backside and frontside analysis of wafers, wafer parts and packaged devices


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